جيفينج سيراميك
المزايا الأساسية ل المكونات الهيكلية الخزفية الزركونيا السوداء لأشباه الموصلات
Controllable Conductivity
Carbon/metal phase doping enables adjustable surface resistance from 10³–10¹⁰Ω, preventing electrostatic particle adsorption.
Ultra‑High Precision
CNC machining tolerance ±0.002mm, surface roughness Ra≤0.05μm, suitable for nanometer processes.
Plasma Corrosion Resistance
Corrosion rate <0.1μm/100h in fluorine/chlorine plasma environment; service life increased by 5×+.
Ultra‑High Cleanliness
لا يوجد ترشيح أيون معدني; passes SEMI F47 particle shedding test (≤5 pcs/sheet @0.3μm).
Complex Structure Forming
Supports injection molding / 3D printing; thin‑wall (≥0.2 مم), special‑shaped, and porous structures available.
Applications of المكونات الهيكلية الخزفية الزركونيا السوداء لأشباه الموصلات
Semiconductor Frontend
- Etching: chamber liners, gas nozzles, wafer chucks
- Deposition (PVD/CVD): shield rings, قواعد, heater trays
- Lithography: mask holders, aligner parts
Display & Packaging
- OLED evaporation: light shields, robot grippers
- Probe stations: ceramic substrates, test sockets
- Advanced packaging: TSV insulation rings, RDL brackets
PV & إلكترونيات
- PV coating: conductive rollers, القضبان التوجيهية
- High‑power devices: IGBT substrates, RF microwave windows
Why Choose Our Black Zirconia Structural Components?
Innovative Material Technology
مادة متقدمة: reaction sintering + خاصرة, 99.5% density, uniform conductive phase. طلاء دي إل سي: معامل الاحتكاك 0.1, wear resistance ×8.
مراقبة جودة العملية الكاملة
All items undergo helium leak testing (leak rate <5×10⁻¹⁰ Pa·m³/s) & X-ray inspection (≤10μm). SEM/EDS and plasma corrosion test reports are provided.
Fast Response System
15-day lead time for standard parts, 30 days for customized non-standard parts; rush orders available upon technical evaluation.
Global Technical Support
We provide FEA simulation optimization, failure analysis and equipment adaptation modification services.
