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セラミックバルブ部品

セラミックバルブディスク

セラミックバルブディスク

Precision ceramic valve discs are made from high-purity alumina (Al₂O₃ ≥99%) or zirconia (Y-TZP) ceramic. They are white round discs with mirror-smooth surfaces (Ra ≤ 0.05μm). The center features precision raised structures, and two symmetric fluid through-holes (Φ1–3mm) are located at the edges. With ultra-high precision sealing, extreme chemical resistance, and zero contamination, they are widely used in semiconductor, pharmaceutical, chemical, and high-purity fluid control systems.

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Core Advantages of Ceramic Valve Disc

Precision Sealing & Flow Control

Zero-leakage sealing: Central raised sealing ring with nano-polished surface, contact ratio >99.5%, leakage rate <0.001mL/min, compliant with ISO 15848.
Dual-hole high-efficiency flow guiding: Symmetric through-holes, uniform flow +30%, pressure loss -20%, suitable for high-viscosity liquids (photoresist, vaccine stock solution).

Extreme Environment Resistance

Full chemical inertness: Resists HF (<5%), concentrated H₂SO₄ (95% @200°C), organic solvents (acetone, DMSO); service life 15× stainless steel.
Particle erosion resistance: Surface hardness 8× tool steel, resistant to SiC/Al₂O₃ particle erosion.

Cleanliness & Reliability

Zero contamination: No metal ion leaching, ISO Class 3 cleanroom certified for semiconductor gas (N₂, Ar) delivery.
Excellent thermal shock resistance: ΔT ≥300°C, withstands CIP/SIP steam shock.

パラメータ	Alumina Valve Chip	Zirconia Valve Chip
材料	99% Al₂O₃	Y-TZP ZrO₂
サイズ	Φ30×5mm (カスタマイズ可能な)	Φ25×4mm (カスタマイズ可能な)
Pressure Resistance	80MPa (static)	100MPa (dynamic)
Max Temp	600℃	400℃
Suitable Media	Strong acid/alkali, high-purity fluid	Chlorine media, biological liquid
認証	SEMI F20, FDA 21 CFR	SEMI F20, FDA 21 CFR